Applications of plasma and ion beam techniques in surface engineering and their fundamentals (tentative)

1. Functional thin films and coatings for industrial applications

Automobile and machinery including tools and molds etc.
Digital electronics and display
Solar cell, fuel cell, battery
Bio- and nano- materials and devices
Environmental friendly plasma applications

2. Advanced plasma processes and surface treatment

PVD, PECVD, hybrid processes etc.
Ion beam processes and surface treatment
Atmospheric plasma processes
High rate deposition, etching and surface treatment
Large area and low temperature processes
Roll to roll processes for polymers, metals and textiles
Plasma diffusion processes: nitriding, carburizing, boriding etc.
Anti-finger printing, hydrophobic and hydrophilic surface functionalization etc.
Other environmental friendly functional plasma processes

3. Plasmas and ions for surface engineering

Advanced plasmas and ion sources
High density and low temperature plasma and ion sources
Plasma modeling and simulation
Process control with plasma diagnostics
Diagnostics of process plasma and plasma chemistry
Plasmas for nano and bio processes

4. Thin film and coating modeling and analysis

modeling of thin films and coatings
characterization of films and modified surfaces
modeling and simulation of film structure and properties
advanced analysis and characterization methods and systems

5. New emerging technologies and industrial applications

Plasma ALD, plasma MOCVD and high density atmosphere plasma process
Damage free film deposition and etching processes etc.
Other emerging plasma processes and applications